Electronic Chemicals

Enabling High-Performance Devices

Low alpha packaging solutions are critical for reliable production of high-performance semiconductor devices.

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Advanced Cleaning Brochure

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High Product Quality & Reliability Delivered

Honeywell Electronic Chemicals (HEC) has superior control of product quality, which ensures the reliability of our supply and high performance in your application.

The semiconductor industry continues to need high-purity chemicals. Meeting increasing demands in both markets requires a reliable supply base. As a vertically integrated basic manufacturer of high-purity process chemicals, we deliver the quality products you need.

We operate highly flexible and efficient manufacturing facilities to give our customers a choice of all package sizes and volumes from bottles to bulk Isotainers.

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Ultra High-Purity to Meet Your Needs

We produce the broadest range of Ultra High-Purity (UHP) chemistries focusing on the Electronics Industry. We’ve established a wide base of application specific products for the semiconductor industry.

Straight Acids and Bases

These are the backbone of wet processes. As device geometries continue to shrink and efforts to reduce defect densities grow, so has the demand for ultra high-purity chemicals. With over 30 years of experience in the production and purification of these chemistries, we offer a suite of finished products with down to 10 part-per-trillion (ppt) impurities.

Etchant Blends

Etchant blends selectively and uniformly remove substrates without damaging underlying layers, critical to wafer manufacturing. Our Etchant Blending expertise ranges from mainstream etchants to the development and manufacture of unique blends for customer-specific applications. These blends benefit from the high-purity levels of our base products.

Solvents

Soolvents and solvent blends are used extensively throughout the semiconductor industry for cleaning equipment, drying wafers and substrate deposition or removal. We have a large portfolio of high-purity solvents to address the needs of the electronics market.

Cleaning chemistries

Cleaning chemistries are critical for reducing defect densities and improving yields. Our innovations in cleaning mixtures have created new blends that reduce cost of ownership, are more environmentally friendly and focus on new interconnect/dielectric materials. Whether repairing the wafer surface for a thermal process, deposition of a substrate or removal of residues from the preceding operation, HEC offers the reliability that your manufacturing process requires. Proprietary blends are available.

Grade SEMI Standard Device Geometry
XLSI Relates to SEMI Grade 4 Recommended for 0.09 – 0.20 µm technologies Trace Metals < 0.1 ppb
SLSI Relates to SEMI Grade 3 Recommended for 0.20 – 0.80 µm technologies Trace Metals < 1 ppb
ULSI Relates to SEMI Grade 2 Recommended for 0.80 – 1.20 µm technologies Trace Metals < 10 ppb
VLSI Relates to SEMI VLSI Recommended for 0.80 – 1.20 µm technologies Trace Metals < 50 ppb for most elements (chemistry dependent)
SEMI/EG Relates to SEMI Grade 1 Recommended for > 1.20 µm technologies For standard applications and manufacturing of discrete devices.

package-electronic-chem-insetSupply Chain

We efficiently deliver the ultra high-purity product you need, where you need it and when you need it. Honeywell Electronic Chemicals combines patented packaging technology with our ability to optimize your shipping costs and maintain purity from the point of manufacture to consumption. Our chemical containers and dispensing systems maintain the highest product purity while maximizing safety and convenience.

Honeywell Electronic Materials has developed a patented, lower-cost, key coded, quick connect coupling system.

We’ve also designed new recyclable, low-cost polyethylene COEX drums and IBCs/totes, suitable for containing high-purity products either on a one-way or shuttle basis.

Quick Connect Coupling

Quick Connect Coupling is compatible with industry standard packaging. It protects personnel handling chemicals and it maintains the purity and quality of your shipments during closed production cycles.

Features of the Honeywell Quick Connect System:
• All components are plastic material.
• Gaskets made of universally chemical resistant perfluoroelastomers.
• Dispense head can be blocked with a check valve.
• You can code for the corresponding chemical.
• Standardized fittings for container threads.
• Meets or exceeds handling standards of high-purity electronic chemicals

Manufactured using injection molding process keeps your costs low

Conductive electric version available for specialty applications.

Safety & Environmental

Safe handling and transportation of HEM products are critical to your operation. With decades of experience, strict policies and guidelines enable us to manufacture, package our products safely to you. And we help you to ensure the same in your facilities.

We meet or exceed all local and federal safety and environmental guidelines. Our facilities minimize waste disposal and we’re continually looking for ways to improve our methods. We also run a container management and recycling process to maximize container life.

wafer-clean-room-electronic-chemicalsPrecision Analysis Backs Up Our Product Integrity

Honeywell Electronic Chemicals maintains state-of-the-art analytical capabilities within our manufacturing facilities. We also develop our own proprietary methodologies to conduct analyses with extremely sensitive detection limits (down to 5 ppt levels).

Basic conditions and capabilities are the backbone of wet processes. As device geometries continue to shrink and efforts to reduce defect densities grow, so has the demand for ultra high-purity chemicals. With over 30 years of experience in the production and purification of these chemistries, we offer a suite of finished products with down to 10 part-per-trillion (ppt) impurities.

• On-site laboratories are certified to class 10,000
• Samples are handled and prepared in class 100 and class 10 environments
• Detection levels for a variety of high-purity chemicals range from 1 ppb to 5 ppt depending on sample preparation and analysis techniques
• Detection levels for a variety of high-purity chemicals range from 1 ppb to 5 ppt depending on sample preparation and analysis techniques
• Gauge studies, correlation studies, and verified spike recoveries all traceable to NIST standards assure optimum accuracy
• All analytical data is maintained on a Laboratory Database, and linked for charting